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Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics:

Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.
Front Cover
Toh-Ming Lu
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Materials Research Society, 1995 - Technology & Engineering - 288 pages

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Contents

Methods and Needs for Low K Material Research
3
Fluorinated Low Thermal Expansion Coefficient Polyimides
19
Investigations of the Low Dielectric Constant Fluorinated
31
Copyright

27 other sections not shown

Common terms and phrases

absorption adhesion aerogels alternating copolyimide anisotropy annealing applications BPDA-PDA bulk capacitance chemical chemical vapor deposition coating constant materials copolymer copper cured density device dielectric film dielectric materials dielectric properties DVS-bisBCB electrical electronic FAST-SOG film thickness films deposited fluorescent fluorinated fluorinated polyimide frequency FTIR glass transition temperature IEEE Trans insulating integrated circuits interface interlayer dielectric labile block layer low dielectric constant lower Materials Research Society measurements mechanical properties metal microelectronic micron modulus moisture monomers Multilevel Interconnection optical organic polymers out-of-plane Parylene patterns permittivity planarization plasma plasma treatment polish rate polyimide film polymeric polystyrene Proc refractive index resin resonators sample shown in Figure silica silica aerogels silicon dioxide silicon wafers siloxane SiO2 SiO2 films slurry SOG film solvent spin-coated spin-on stress substrate surface Symp Table technique Technology test structure thermal expansion coefficient thermal stability thin films vapor deposition

Bibliographic information

QR code for Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics
TitleLow-dielectric Constant Materials-- Synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.
Volume 381 of Materials Research Society symposium proceedings, Materials Research Society symposium proceedings
Volume 381 of Symposium Proceedings Series
EditorToh-Ming Lu
PublisherMaterials Research Society, 1995
Original fromthe University of California
Digitized7 Apr 2011
ISBN1558992847, 9781558992849
Length288 pages
Subjects ›  › 

Technology & Engineering / Electrical
Technology & Engineering / Electronics / General
  
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