This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing ...

A discussion is given of the types of interfacial regions which may be formed between a film and a substrate. Various deposition techniques are compared as to their ability to ...

This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded ...