High Temperature Vapors: Science and Technology |
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Page 95
... deposition substrate must be kept at a relatively high temperature . With the first process type a high temperature vapor phase is usually required to generate the reduced valence species necessary to disproportionation reactions . High ...
... deposition substrate must be kept at a relatively high temperature . With the first process type a high temperature vapor phase is usually required to generate the reduced valence species necessary to disproportionation reactions . High ...
Page 104
... deposition process can have an adverse effect on the rate and efficiency of deposition . For example , consider the deposition of Nb metal by the thermal decomposition of NbCl , vapor , i.e. , by the process NbCl - > Nb ( s ) + 5Cl ...
... deposition process can have an adverse effect on the rate and efficiency of deposition . For example , consider the deposition of Nb metal by the thermal decomposition of NbCl , vapor , i.e. , by the process NbCl - > Nb ( s ) + 5Cl ...
Page 184
... deposition rate as a function of condensed niobium iodide temperature for filament temperatures of 1000 and 1100 ° C ... deposition rate , as typified by the example in Fig . 3.11 , may have an alternative explanation . For the Zr ...
... deposition rate as a function of condensed niobium iodide temperature for filament temperatures of 1000 and 1100 ° C ... deposition rate , as typified by the example in Fig . 3.11 , may have an alternative explanation . For the Zr ...
Contents
Appendix Major Literature Sources for High Temperature Chemistry | 36 |
GraphiteGas Reactions | 59 |
Appendix Some Additional Recent Literature on High Temperature GasSolid | 89 |
Copyright | |
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addition alkali metal atoms basic bond dissociation energies Bulewicz calculated Chapter Chem chemical reaction chemical vapor deposition chemistry chloride combustion complex components composition concentration condensed considered corrosion determined diffusion flames discussion dissociation energies effect electron emission enthalpy entropy equilibrium constant example experimental fission fission products fluorides formation free energy fuel gases given H-atom H₂ H₂O halogen heat Hence high temperature species high temperature vapors hydroxide inhibition inhibitor interaction involving ionization ions kcal mol-¹ kinetic mass spectrometric materials metal halide metal oxide mole mole fraction molecular species NaCl nuclear fission observed oxide oxygen Padley partial pressure phase Phys plasma premixed premixed flames present production radical reactants reaction rates reaction zone reactor recent recombination reduced region relatively rocket Section solid solubility spectroscopic stability Sugden surface Symp Table techniques temperature thermal thermodynamic tion vapor deposition vapor species vapor-phase volatile York