John Wiley & Sons, Mar 13, 2001 - Science - 500 pages
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
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General Introduction to Microstructure Technology
The Parallels to Microelectronics
The Physical and Chemical Basics in Microtechnology
Basic Technologies in MEMS
Silicon Microsystem Technology
The LIGA Process
Alternative Processes of Microstructuring
Packaging and Interconnecting Techniques PIT
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absorber acceleration achieved actuators adhesion alignment anisotropic applications array atoms bonding cathode chemical circuit CMOS coefficient components depends deposition devices diameter dielectric diffusion dimensions doping dry etching electrical electrolyte electron beam electron beam lithography electroplating electrostatic energy etch process etch rate etchant fabricated fluidic heat increasing injection molding integrated integrated circuit ions isotropic laser lattice LIGA process liquid magnetic manufacturing mask material mbar mechanical membrane metal method micro microelectronics micromachining microstructures microsystem technology mold insert molecular molecules optical oxide parameters particles pattern phase photolithography photoresist planes plasma plastic PMMA polymer polymerization polysilicon pressure produced pump reaction region resist layer sacrificial layer schematically Section semiconductor shown in Fig signal single crystal solution sputtering step structure substrate surface surface micromachining synchrotron radiation techniques temperature thermal thickness thin films tion titanium transfer ture vacuum vapor voltage wafer wavelength wire X-ray lithography
Page 480 - DR Sparks, SR Zarabadi, JD Johnson, Q. Jiang, M. Chia. O. Larsen, W. Higdon, P. Castillo-Borelley: A CMOS Integrated Surface Micromachined Angular Rate Sensor, Its Automotive Applications; Digest of Technical Papers of Tansducers 97, Chicago, USA, June 16-19, 1997, Vol.