Microsystem Technology

Front Cover
John Wiley & Sons, Mar 13, 2001 - Science - 500 pages
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
 

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Contents

General Introduction to Microstructure Technology
1
The Parallels to Microelectronics
15
The Physical and Chemical Basics in Microtechnology
45
Basic Technologies in MEMS
109
Lithography
171
Silicon Microsystem Technology
209
The LIGA Process
289
Alternative Processes of Microstructuring
381
Packaging and Interconnecting Techniques PIT
403
System Technology
431
Literatur
465
Copyright

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Page 480 - DR Sparks, SR Zarabadi, JD Johnson, Q. Jiang, M. Chia. O. Larsen, W. Higdon, P. Castillo-Borelley: A CMOS Integrated Surface Micromachined Angular Rate Sensor, Its Automotive Applications; Digest of Technical Papers of Tansducers 97, Chicago, USA, June 16-19, 1997, Vol.

About the author (2001)

Oliver Paul holds the Chair for Microsystem Materials at IMTEK The Institute for Microsystem Technology University of Freiburg, Germany. His group focusses on MEMS materials, technologies, and devices. He is a co-author of more than 120 technical publications, two patents, and two books. He is a member of the editorial board of Sensors and Actuators A, has co-founded the Swiss MEMS company Sensirion, has served on the technical program committees of numerous European and international conferences, and is member of the Steering Committee of the IEEE MEMS conference.

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