John Wiley & Sons, Mar 13, 2001 - Science - 500 pages
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
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Adhesive Strength of the Layer
Ion Plating or Plasma Assisted Deposition
Sacrificial Polymer micromachining
Thermal Micro Devices and Systems
Physical Etch Technologies
Chemical Etching Technologies
XRay Photoelectron Spectroscopy XPS
Silicon Microsystem Technology
Basic Etch Shapes
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absorber achieved actuators addition adhesion applications atoms base beam bond carried chemical circuit CMOS components concentration conducting consists crystal defined density depends deposition described devices diffusion direction effect electrical electron electroplating elements energy etching example fabricated field flow heat height higher important increasing injection integrated ions lattice layer leads LIGA light limited liquid lithography manufacture mask material means measured mechanical membrane metal method micro microelectronics micromachining microstructures microsystem molding optical oxide parameters particles pattern phase physical planes plasma plastic plate PMMA polymer position possible pressure principle produced properties pump radiation reaction reflection region removed resist respect sensor shape shown in Fig shows signal silicon single solution step structure substrate surface techniques temperature thermal thickness thin tion transfer unit vacuum wafer wavelength X-ray
Page 480 - DR Sparks, SR Zarabadi, JD Johnson, Q. Jiang, M. Chia. O. Larsen, W. Higdon, P. Castillo-Borelley: A CMOS Integrated Surface Micromachined Angular Rate Sensor, Its Automotive Applications; Digest of Technical Papers of Tansducers 97, Chicago, USA, June 16-19, 1997, Vol.