Microsystem Technology

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John Wiley & Sons, Mar 13, 2001 - Science - 500 pages
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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Contents

8
8
8
16
3
40
Vacuum Production
117
Vacuum Measurement
125
Adhesive Strength of the Layer
132
4
137
Ion Plating or Plasma Assisted Deposition
139
Dry Etching
241
Surface Micromachining
248
Sacrificial Polymer micromachining
254
2
258
Thermal Micro Devices and Systems
263
3
271
5
273
1
289

Epitaxy
146
Physical Etch Technologies
155
Chemical Etching Technologies
162
XRay Photoelectron Spectroscopy XPS
168
3
205
Silicon Microsystem Technology
209
Silicon Micromachining
215
Basic Etch Shapes
227
Etching Control
234
6
347
6
369
7
376
Mechanical Micromanufacturing
381
9
403
255
483
422
485
428
492
Copyright

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Page 480 - DR Sparks, SR Zarabadi, JD Johnson, Q. Jiang, M. Chia. O. Larsen, W. Higdon, P. Castillo-Borelley: A CMOS Integrated Surface Micromachined Angular Rate Sensor, Its Automotive Applications; Digest of Technical Papers of Tansducers 97, Chicago, USA, June 16-19, 1997, Vol.

About the author (2001)

Oliver Paul holds the Chair for Microsystem Materials at IMTEK The Institute for Microsystem Technology University of Freiburg, Germany. His group focusses on MEMS materials, technologies, and devices. He is a co-author of more than 120 technical publications, two patents, and two books. He is a member of the editorial board of Sensors and Actuators A, has co-founded the Swiss MEMS company Sensirion, has served on the technical program committees of numerous European and international conferences, and is member of the Steering Committee of the IEEE MEMS conference.

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