Microsystem Technology

Front Cover
John Wiley & Sons, Mar 13, 2001 - Science - 500 pages
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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Contents

4
4
2
117
5
133
6
151
7
164
Resists
171
6
192
7
202
5
324
6
341
2
394
9
403
2
413
4
420
6
428
System Technology
431

Application of Xray Lithography
208
2
215
3
248
4
257
5
287

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Page 480 - DR Sparks, SR Zarabadi, JD Johnson, Q. Jiang, M. Chia. O. Larsen, W. Higdon, P. Castillo-Borelley: A CMOS Integrated Surface Micromachined Angular Rate Sensor, Its Automotive Applications; Digest of Technical Papers of Tansducers 97, Chicago, USA, June 16-19, 1997, Vol.