ProceedingsIEEE, 1997 - Artificial intelligence |
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Page 234
... observed . As an example in the proportional step , the Si wafer levitates at 275 um when supplied pressure is 1 kgf / cm2 . Fig . 6. Experimental apparatus Levitation height ( um ) 500 400 300 200 IV . MEASUREMENT RESULTS The ...
... observed . As an example in the proportional step , the Si wafer levitates at 275 um when supplied pressure is 1 kgf / cm2 . Fig . 6. Experimental apparatus Levitation height ( um ) 500 400 300 200 IV . MEASUREMENT RESULTS The ...
Page 250
... observed and measured using a laser profiler . Fig . 6 shows the surface roughness of etched ( 110 ) silicon planes . The surface roughness was observed to have a minimum at 41 exact wt . % and a maximum at 36 exact wt . % of KOH ...
... observed and measured using a laser profiler . Fig . 6 shows the surface roughness of etched ( 110 ) silicon planes . The surface roughness was observed to have a minimum at 41 exact wt . % and a maximum at 36 exact wt . % of KOH ...
Page 252
... observed in KOH solution at low temperature and high concentration . The maximum etch 0032 200 $ 500 12 WO33 Fig . 12 Fabricated comb structures . The width is 8m , gap is 7μm and height is about 150μm rate ratio is above 150 at 45 ...
... observed in KOH solution at low temperature and high concentration . The maximum etch 0032 200 $ 500 12 WO33 Fig . 12 Fabricated comb structures . The width is 8m , gap is 7μm and height is about 150μm rate ratio is above 150 at 45 ...
Contents
Innovations in Design and Integrated | 1 |
Creative and Innovative Manufacturing | 4 |
Y Fan and C Wu Tsinghua Univ | 7 |
Copyright | |
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according activities algorithm allows analysis application approach architecture assembly ATRT Automation called communication complete components considered constraints control system cost customers decision defined described determined dispatching distributed dynamic effective Engineering enterprise environment error estimated example exists Figure fixture flexible flow function given implementation important improvement industrial input integration interaction interface INTRODUCTION knowledge lead learning load locating machine manuals manufacturing means measurements method nets object obtained operation optimal output parameters performance Petri planning plant position possible presented problem proposed prototype real-time reference represents requirements robot rules scheduling selected sequence server shown shows simulation solution specific standard station structure task token tool transition unit University virtual