Low-dielectric Constant MaterialsMaterials Research Society, 1996 - Electric insulators and insulation |
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... Research Society . All rights reserved . This book has been registered with Copyright Clearance Center , Inc. For further information , please contact the Copyright Clearance Center ... Materials Research Society Symposium Proceedings.
... Research Society . All rights reserved . This book has been registered with Copyright Clearance Center , Inc. For further information , please contact the Copyright Clearance Center ... Materials Research Society Symposium Proceedings.
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MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 420— Amorphous Silicon Technology - 1996 , M. Hack ... RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 444— Materials for Mechanical Materials Research Society Symposium Proceedings.
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 420— Amorphous Silicon Technology - 1996 , M. Hack ... RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 444— Materials for Mechanical Materials Research Society Symposium Proceedings.
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MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 444— Materials for Mechanical and Optical Microsystems , M.L. Reed , M ... Materials Research Society Low - Dielectric Constant Materials II Low Dielectric Constant Materials.
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS Volume 444— Materials for Mechanical and Optical Microsystems , M.L. Reed , M ... Materials Research Society Low - Dielectric Constant Materials II Low Dielectric Constant Materials.
Contents
LowDielectric Constant Materials for IC Intermetal | 3 |
A Study of Anisotropy of Spin Cast and VaporDeposited | 15 |
A Low R Material Candidate for ULSI | 21 |
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1997 Materials Research a-C:F film adhesion alloy ambient annealing as-deposited BEOL capacitance chemical chemical vapor deposition concentration crosslinking CTAC/TEOS cured dangling bonds decrease density deposition rate desorption dielectric constant DLC films electron ellipsometry etch rate evaporation F content FDLC Figure film thickness films deposited fluorine fluorocarbon FSG films FTIR glass transition temperature HDPCVD hydrogen imidization increasing integrated interface low dielectric constant low-k Materials Research Society measured metal moisture absorption mtorr Multilevel Interconnection nanoporous nanoporous silica O2 plasma oxide Parylene peak PECVD PFCB Phys planarization polyimide polymer pore porosity porous silica precursor Proc properties PTFE reaction reduced refractive index resistance rf power sample sccm semiconductor shows shrinkage Si-O-Si Si-OH Si-rich SiF4 silica films silicon SiO2 SiOF films SiOF layers Solid solvent spectra spin-coating stress structure surface Symp TEOS thermal stability thin films ULSI vapor deposition vibrational wafer Wavenumber