Low-dielectric Constant MaterialsMaterials Research Society, 1996 - Electric insulators and insulation |
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Page 7
... thermosetting polymers developed by Dow Chemical Co. [ 19 ] . The derivatives most widely discussed are designated as Cyclotene TM , and are based on the thermally - induced Diels - Alder polymerization of 1,3 - divinyl - 1,1,3,3 ...
... thermosetting polymers developed by Dow Chemical Co. [ 19 ] . The derivatives most widely discussed are designated as Cyclotene TM , and are based on the thermally - induced Diels - Alder polymerization of 1,3 - divinyl - 1,1,3,3 ...
Page 35
... thermosetting polymer . The dielectric constant of PFCB at 2.35 is well below the range of competing polymer dielectrics . This feature makes PFCB an attractive dielectric for use as an interlayer dielectric ( ILD ) material . CH , CH ...
... thermosetting polymer . The dielectric constant of PFCB at 2.35 is well below the range of competing polymer dielectrics . This feature makes PFCB an attractive dielectric for use as an interlayer dielectric ( ILD ) material . CH , CH ...
Contents
LowDielectric Constant Materials for IC Intermetal | 3 |
A Study of Anisotropy of Spin Cast and VaporDeposited | 15 |
A Low R Material Candidate for ULSI | 21 |
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1997 Materials Research a-C:F film adhesion ambient annealing applications as-deposited atoms BEOL capacitance chemical concentration crosslinking cure temperature cured films dangling bonds decrease density deposition rate desorption dielectric constant DLC films electron ellipsometry etch rate evaporation F content Figure film thickness films deposited fluorine fluorocarbon fluoropolymers frequency FSG films FTIR glass transition temperature groups HDPCVD hydrogen imidization increasing integrated interface ISBN low dielectric constant low-k Materials Research Society measured metal moisture absorption monomers mtorr Multilevel Interconnection nanoporous nanoporous silica oxazole oxide Parylene Parylene AF-4 peak PECVD PFCB planarization polyimide polymerization polymers porosity precursor Proc properties PTFE ratio reaction refractive index resistance sample sccm semiconductor shows Si-F Si-O-Si SiDLC SiF4 silicon SiO2 SiOF films solvent spectra spin cast spin-coating stress structure substrate surface Symp thermal stability thin films ULSI vapor deposition wafer Wavenumber xerogel xerogel films