Low-dielectric Constant MaterialsMaterials Research Society, 1996 - Electric insulators and insulation |
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Page 26
THERMAL STABILITY Major challenges for using thin films of organic polymers are thermal stability , chemical stability , and mechanical properties . The choice of polymer lies in its ability to satisfy design and processing ...
THERMAL STABILITY Major challenges for using thin films of organic polymers are thermal stability , chemical stability , and mechanical properties . The choice of polymer lies in its ability to satisfy design and processing ...
Page 96
... thin films via supercritical processing , the solvent can Figure 8. Thin film evaporation rates at easily evaporate after deposition and before ambient temperature . gelation / drying if precautions are not taken . concept of spinning the ...
... thin films via supercritical processing , the solvent can Figure 8. Thin film evaporation rates at easily evaporate after deposition and before ambient temperature . gelation / drying if precautions are not taken . concept of spinning the ...
Page 165
... thin films ( a - C : F ) for use as low - dielectric - constant interlayer dielectrics were deposited by helicon - wave plasma - enhanced chemical vapor deposition using fluorocarbon compounds as a source material . The a - C : F films ...
... thin films ( a - C : F ) for use as low - dielectric - constant interlayer dielectrics were deposited by helicon - wave plasma - enhanced chemical vapor deposition using fluorocarbon compounds as a source material . The a - C : F films ...
Contents
LowDielectric Constant Materials for IC Intermetal | 3 |
A Study of Anisotropy of Spin Cast and VaporDeposited | 15 |
A Low R Material Candidate for ULSI | 21 |
Copyright | |
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1997 Materials Research a-C:F film adhesion alloy ambient annealing as-deposited BEOL capacitance chemical chemical vapor deposition concentration crosslinking CTAC/TEOS cured dangling bonds decrease density deposition rate desorption dielectric constant DLC films electron ellipsometry etch rate evaporation F content FDLC Figure film thickness films deposited fluorine fluorocarbon FSG films FTIR glass transition temperature HDPCVD hydrogen imidization increasing integrated interface low dielectric constant low-k Materials Research Society measured metal moisture absorption mtorr Multilevel Interconnection nanoporous nanoporous silica O2 plasma oxide Parylene peak PECVD PFCB Phys planarization polyimide polymer pore porosity porous silica precursor Proc properties PTFE reaction reduced refractive index resistance rf power sample sccm semiconductor shows shrinkage Si-O-Si Si-OH Si-rich SiF4 silica films silicon SiO2 SiOF films SiOF layers Solid solvent spectra spin-coating stress structure surface Symp TEOS thermal stability thin films ULSI vapor deposition vibrational wafer Wavenumber