Low-dielectric Constant Materials, Volume 476Materials Research Society, 1997 - Electric insulators and insulation |
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Page 19
We have found 3 failure modes : 1 ) capping SiO2 layer peels off , 2 ) thickness reduction of a - C : F by decomposition , and 3 ) etching phenomena at the interface between SiO2 and a - C : F by CFx outgassing from a - C : F . The ...
We have found 3 failure modes : 1 ) capping SiO2 layer peels off , 2 ) thickness reduction of a - C : F by decomposition , and 3 ) etching phenomena at the interface between SiO2 and a - C : F by CFx outgassing from a - C : F . The ...
Page 22
Therefore , silicon oxide deposition using a high bias - added process was indispensable to achieve good protection from oxygen plasma ambient in order to form void - free SiO2 . 2 ) Decomposition failure mode of Sio , capped a - C : F ...
Therefore , silicon oxide deposition using a high bias - added process was indispensable to achieve good protection from oxygen plasma ambient in order to form void - free SiO2 . 2 ) Decomposition failure mode of Sio , capped a - C : F ...
Page 273
INTRODUCTION a There is considerable interest in insulating films with static dielectric constants , Es , lower than SiO2 for use as isolating layers between thin film metal interconnects in integrated circuits .
INTRODUCTION a There is considerable interest in insulating films with static dielectric constants , Es , lower than SiO2 for use as isolating layers between thin film metal interconnects in integrated circuits .
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Contents
Polynorbornene for Lowk Interconnection | 3 |
High Thermal Stability for ULSI Interlayer Dielectric | 9 |
F During Oxygen Plasma Annealing | 19 |
Copyright | |
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Common terms and phrases
addition adhesion analysis annealing applications atoms bond capacitance chamber chemical coating compared concentration copolymers cost cured curve cycle decrease density dependence deposited determined device dielectric constant diffusion DISCUSSION effect electrical electron energy etch etch rate experiments Figure flow fluorine formed function groups heating higher improved increase indicate integrated interconnect interface layer less lines loss low dielectric constant lower materials measured mechanical metal mode modulus moisture observed obtained occurs oxide oxygen PA-N peak performance plasma polishing polyimide polymer pressure Proc properties range ratio reaction reduced refractive index relative Research resistance respectively sample shown shows Si-F signal silicon SiO2 SiOF films solution spectra strength stress structure substrate surface Table Teflon temperature TEOS thermal thermal stability thickness thin films treatment wafer
Bibliographic information
| Title | Low-dielectric Constant Materials, Volume 476 Volume 381; Volume 443; Volume 476; Volume 511; Volume 565 of Materials Research Society symposia proceedings |
| Publisher | Materials Research Society, 1997 |
| Original from | the University of Michigan |
| Digitized | 10 Dec 2007 |
| ISBN | 1558993800, 9781558993808 |
| Export Citation | BiBTeX EndNote RefMan |