Low-dielectric Constant Materials, Volume 476Materials Research Society, 1997 - Electric insulators and insulation |
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Page 99
... frequency up to 107Hz , for several weight percent loadings of water . They used dielectric relaxation measurements to show that the low frequency values for the dielectric constant are strongly dependent on the water content in the ...
... frequency up to 107Hz , for several weight percent loadings of water . They used dielectric relaxation measurements to show that the low frequency values for the dielectric constant are strongly dependent on the water content in the ...
Page 101
... frequencies [ 7,8 ] . The specific case for a small dielectric sphere in a TE10 mode waveguide cavity has been developed in ... frequency due to the presence of the dielectric sample in the cavity . The instrument used here is based on a ...
... frequencies [ 7,8 ] . The specific case for a small dielectric sphere in a TE10 mode waveguide cavity has been developed in ... frequency due to the presence of the dielectric sample in the cavity . The instrument used here is based on a ...
Page 102
... frequency . The resonant frequency shift is recorded and stored in less than 20msec , using a Hewlett - Packard Model 8565A microwave spectrum analyzer ( see Fig.2 ) . The actual frequency shift ( Af ) is measured from the calibrated ...
... frequency . The resonant frequency shift is recorded and stored in less than 20msec , using a Hewlett - Packard Model 8565A microwave spectrum analyzer ( see Fig.2 ) . The actual frequency shift ( Af ) is measured from the calibrated ...
Contents
Polynorbornene for Lowk Interconnection | 3 |
SILK Polymer Coating With LowDielectric Constant | 9 |
F During Oxygen Plasma Annealing | 19 |
Copyright | |
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adhesion aerogel annealing as-deposited atoms BCB film bond BPDA-PDA capacitance Chemat-B chemical cm¹ CMP process coating copolymers cured films curve decrease delamination density deposition rate device dielectric constant dielectric material diffusion e-beam cured effect electron Figure film stress film thickness films deposited fluorinated polyimide fluorine fluoropolymer FSG films FTEOS films FTIR gap fill glass transition temperature heating in-plane increase integrated circuits interface labile block layer low dielectric constant low-k measured mechanical metal lines modulus moisture Multilevel Interconnection norbornene optical out-of-plane oxide oxygen PA-N film parylene Parylene-N peak PECVD Phys planarization plasma plasma treatment polishing polyimide polymer polymerization precursor pressure Proc properties PTFE ratio reaction refractive index sample shows Si-F Si-O-Si silica silicon SiO2 SiOF films slurry spectra spin-coated spin-on structure substrate surface Teflon-AF temperature TEOS thermal cycles thermal stability thin films ULSI vapor wafer wet etch