Low-dielectric Constant Materials, Volume 476Materials Research Society, 1997 - Electric insulators and insulation |
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... spectra is a milestone in NMR spectroscopy. Professor R. R. Ernst, who has made outstanding contributions to 2D NMR theories, won solely the Nobel Prize in chemistry in 1991, a brilliant ... spectra General Knowledge about 2D NMR Spectra.
... spectra is a milestone in NMR spectroscopy. Professor R. R. Ernst, who has made outstanding contributions to 2D NMR theories, won solely the Nobel Prize in chemistry in 1991, a brilliant ... spectra General Knowledge about 2D NMR Spectra.
Page 45
... spectra were constructed . We use the category suggested by Adams [ 8 ] . Some authors have developed a finer theory by indexing terms of a spectrum not by integers but by finite di ... Spectra , Duality , Ring and Module Spectra 45.
... spectra were constructed . We use the category suggested by Adams [ 8 ] . Some authors have developed a finer theory by indexing terms of a spectrum not by integers but by finite di ... Spectra , Duality , Ring and Module Spectra 45.
Page 584
... Spectra , absorption , of ions in crystals 340 Spectra , absorption , of ions in solutions 329 , 332 , ( 334 ) , 502 Spectra , dielectronic 82 , 381 , 391 , 433 , 439 , 446 , 465 Spectra , emission , of free atoms and ions 318 Spectra ...
... Spectra , absorption , of ions in crystals 340 Spectra , absorption , of ions in solutions 329 , 332 , ( 334 ) , 502 Spectra , dielectronic 82 , 381 , 391 , 433 , 439 , 446 , 465 Spectra , emission , of free atoms and ions 318 Spectra ...
Contents
Polynorbornene for Lowk Interconnection | 3 |
SILK Polymer Coating With LowDielectric Constant | 9 |
F During Oxygen Plasma Annealing | 19 |
Copyright | |
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adhesion aerogel annealing as-deposited atoms BCB film bond BPDA-PDA capacitance Chemat-B chemical cm¹ CMP process coating copolymers cured films curve decrease delamination density deposition rate device dielectric constant dielectric material diffusion e-beam cured effect electron Figure film stress film thickness films deposited fluorinated polyimide fluorine fluoropolymer FSG films FTEOS films FTIR gap fill glass transition temperature heating in-plane increase integrated circuits interface labile block layer low dielectric constant low-k measured mechanical metal lines modulus moisture Multilevel Interconnection norbornene optical out-of-plane oxide oxygen PA-N film parylene Parylene-N peak PECVD Phys planarization plasma plasma treatment polishing polyimide polymer polymerization precursor pressure Proc properties PTFE ratio reaction refractive index sample shows Si-F Si-O-Si silica silicon SiO2 SiOF films slurry spectra spin-coated spin-on structure substrate surface Teflon-AF temperature TEOS thermal cycles thermal stability thin films ULSI vapor wafer wet etch