MEMS and Microsystems: Design and Manufacture

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McGraw-Hill, 2002 - Microelectromechanical systems - 436 pages

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MEMS and Microsystems: Design and Manufacture
Tai-Ran Hsu
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Bibliographic information

TitleMEMS and Microsystems: Design and Manufacture
Mechanical engineering series
AuthorTai-Ran Hsu
PublisherMcGraw-Hill, 2002
ISBN0071204768, 9780071204767
Length436 pages
  
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