Micromechanics and MEMS: classic and seminal papers to 1990

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IEEE Press, Jan 29, 1997 - Science - 701 pages
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Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

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Contents

Early Papers in Micromechanics
1
Side Drive Actuators
145
Comb Drive Actuators
185
Copyright

15 other sections not shown

Other editions - View all

Micromechanics and MEMS: classic and seminal papers to 1990
W. Trimmer,Institute of Electrical and Electronics Engineers
Snippet view - 1997

Common terms and phrases

accelerometer alignment anisotropic etching applied bonding cantilever capacitance capacitor cavity charge chip circuit clamping deflection density deposited developed diaphragm dielectric displacement drive electric field Electron Devices electrostatic force electrostatic motor element etchant experimental fabrication fiber Figure flow frequency friction geometry glass IEEE Micro input insulator integrated layer levitation linear LPCVD magnetic mask material measured Mechanical Systems membrane metal microactuators microdynamics micromachining micromotor microstructures motion operation optical output oxide parameters pattern photoresist piezoelectric planes plate poly-Si polyimide polysilicon potential pressure sensor ratio Research resistor resonant rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive silicon dioxide silicon nitride silicon wafer simulation slider Solid-State Sensors stator step stress structure substrate surface techniques temperature thermal thickness thin films tion torque Transducers tungsten valve velocity voltage wire wobble motor Workshop Young's modulus

References to this book

MEMS and microsystems: design and manufacture
Tai-Ran Hsu
Snippet view - 2002
Microsystem Technology
Wolfgang Menz,Jürgen Mohr,J. Mohr,Oliver Paul
Limited preview - 2001
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About the author (1997)

About the Editor William S. Trimmer has been working in micromechanics since 1985. He is currently with Belle Mead Research, Inc. Dr. Trimmer co-organized the first workshop in the MEMS series, "Micro Robots and Teleoperators Workshop;" co-organized the National Science Foundation (NSF) workshop on Microelectromechanical Systems Research; co-edited the NSF report "Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics;" edited a special section of the Sensors and Actuators Journal; and started the "Micromechanics" section in the Sensors and Actuators Journal. He organized the first joint IEEE/ASME journal, The Journal of Microelectromechanical Systems, and was the editor for the first six years.

Bibliographic information

QR code for Micromechanics and MEMS
TitleMicromechanics and MEMS: classic and seminal papers to 1990
AuthorsW. Trimmer, Institute of Electrical and Electronics Engineers
EditorW. Trimmer
Editionillustrated
PublisherIEEE Press, 1997
Original fromthe University of Michigan
Digitized10 Dec 2007
ISBN0780310853, 9780780310858
Length701 pages
Subjects ›  › 

Actuators
Electromechanical devices
Microelectromechanical systems
Microelectronics
Micromechanics
Science / Physics / Condensed Matter
Technology & Engineering / Electrical
Technology & Engineering / Electronics / General
Technology & Engineering / Electronics / Microelectronics
Technology & Engineering / Mechanical
  
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