Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 121
... example , fermentation , distillation , oil refinement , and electric power generation . As mechanical components and elec- tronics continue to shrink , the benefits of the microdynamics ap- proach to discrete manufacturing are obvious ...
... example , fermentation , distillation , oil refinement , and electric power generation . As mechanical components and elec- tronics continue to shrink , the benefits of the microdynamics ap- proach to discrete manufacturing are obvious ...
Page 291
... example micromotor has three phases , the maxi- mum time average electric torque for it is 3 times that given by ( 8 ) . Finally , for the example micromotor , Maximum ( C , ( 0 ) ) = €。π ( R2 – R ? ) - 6 D ( 9 ) where a parallel ...
... example micromotor has three phases , the maxi- mum time average electric torque for it is 3 times that given by ( 8 ) . Finally , for the example micromotor , Maximum ( C , ( 0 ) ) = €。π ( R2 – R ? ) - 6 D ( 9 ) where a parallel ...
Page 296
... example , the shapes of the two corresponding curves in Fig- ure 2 spread away from the synchronous velocity as rotor con- ductivity increases ; they shrink toward the synchronous veloc- ity as rotor conductivity decreases . The maximum ...
... example , the shapes of the two corresponding curves in Fig- ure 2 spread away from the synchronous velocity as rotor con- ductivity increases ; they shrink toward the synchronous veloc- ity as rotor conductivity decreases . The maximum ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus