Micromechanics and MEMS: Classic and Seminal Papers to 1990

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William S. Trimmer
Wiley, Jan 29, 1997 - Technology & Engineering - 701 pages
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

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Contents

Early Papers in Micromechanics
1
Valves and Pumps
24
Side Drive Actuators
145
Copyright

15 other sections not shown

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