Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 206
... Applied voltage , V Fig . 11 Displacements of gripper tip 30 35 An applied potential of 20V resulted in 2-3μm movements of each gripper tip in both the open and close direction . Defining gripping range as the difference between the ...
... Applied voltage , V Fig . 11 Displacements of gripper tip 30 35 An applied potential of 20V resulted in 2-3μm movements of each gripper tip in both the open and close direction . Defining gripping range as the difference between the ...
Page 263
... applied voltages and the rotational angle around the x axis for the experiment of the Mode 2. The curved lines in these figures were drawn as a quadratic approximation with respect to applied voltages . From the formula for the ...
... applied voltages and the rotational angle around the x axis for the experiment of the Mode 2. The curved lines in these figures were drawn as a quadratic approximation with respect to applied voltages . From the formula for the ...
Page 412
... applied load . The state of lock ( clamp ) means keeping position against applied load . Since the state of free means completely free or highly flexible against load . It is extremely important for actuator to have both states of lock ...
... applied load . The state of lock ( clamp ) means keeping position against applied load . Since the state of free means completely free or highly flexible against load . It is extremely important for actuator to have both states of lock ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus