Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 247
... axial force where A is the capacitor plate area , V is the applied potential , d is the gap between the bars , & is ... axial direction , of the support beams as they deflect ( Fig . 2b ) . The third is the axial extension , Xe , of the ...
... axial force where A is the capacitor plate area , V is the applied potential , d is the gap between the bars , & is ... axial direction , of the support beams as they deflect ( Fig . 2b ) . The third is the axial extension , Xe , of the ...
Page 296
... Axial Dimensions Both the motive torque and transverse force are functions of IM axial dimensions . Hovever , they are different functions of these dimensions so they can , perhaps , be independently ma- nipulated during design . In ...
... Axial Dimensions Both the motive torque and transverse force are functions of IM axial dimensions . Hovever , they are different functions of these dimensions so they can , perhaps , be independently ma- nipulated during design . In ...
Page 298
... axial length multiplied by its azimuthal electrical periodicity . In this case , the radial , azimuthal and axial cylindrical coordinates of the original rotary IM , namely r , and z , become the Cartesian coordinates of the equivalent ...
... axial length multiplied by its azimuthal electrical periodicity . In this case , the radial , azimuthal and axial cylindrical coordinates of the original rotary IM , namely r , and z , become the Cartesian coordinates of the equivalent ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus