Micromechanics and MEMS: classic and seminal papers to 1990

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IEEE Press, Jan 29, 1997 - Science - 701 pages
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Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

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Contents

Early Papers in Micromechanics
1
Side Drive Actuators
145
Comb Drive Actuators
185
Copyright

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About the author (1997)

About the Editor William S. Trimmer has been working in micromechanics since 1985. He is currently with Belle Mead Research, Inc. Dr. Trimmer co-organized the first workshop in the MEMS series, "Micro Robots and Teleoperators Workshop;" co-organized the National Science Foundation (NSF) workshop on Microelectromechanical Systems Research; co-edited the NSF report "Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics;" edited a special section of the Sensors and Actuators Journal; and started the "Micromechanics" section in the Sensors and Actuators Journal. He organized the first joint IEEE/ASME journal, The Journal of Microelectromechanical Systems, and was the editor for the first six years.

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