Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 85
... CALCULATED 1.0 0.5 ( 1 ) ( 2 ) 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Normalized Deflection A = ( 8 / d ) Fig . 48. Calculated beam deflection is plotted here as the lighter line . At the threshold voltage ( the peak in the calculated ...
... CALCULATED 1.0 0.5 ( 1 ) ( 2 ) 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Normalized Deflection A = ( 8 / d ) Fig . 48. Calculated beam deflection is plotted here as the lighter line . At the threshold voltage ( the peak in the calculated ...
Page 191
... calculated resonant frequencies in Tables I and II are found from Eqns . ( 8 ) and ( 9 ) with the Young's modulus adjusted to give the best fit to the experimental data . For the serpentine- spring torsional structures , a finite ...
... calculated resonant frequencies in Tables I and II are found from Eqns . ( 8 ) and ( 9 ) with the Young's modulus adjusted to give the best fit to the experimental data . For the serpentine- spring torsional structures , a finite ...
Page 340
... calculated in the configuration . The torque ( T1 ) at 2–5 kV was calculated as a function of the aspect ratio ( R , in Fig . 2 ) of the rotors ( Fig . 4 ) . It is clear that the torque is proportional to the square of the voltage . The ...
... calculated in the configuration . The torque ( T1 ) at 2–5 kV was calculated as a function of the aspect ratio ( R , in Fig . 2 ) of the rotors ( Fig . 4 ) . It is clear that the torque is proportional to the square of the voltage . The ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus