Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 83
Page 36
... CANTILEVER MOVEMENT IN RESONANT GATE DEVICES The vibrations of a polarized , mechanically resonant cantilever can be detected either by field - effect modula- tion of an MOS transistor or , alternately , by using the cantilever as a ...
... CANTILEVER MOVEMENT IN RESONANT GATE DEVICES The vibrations of a polarized , mechanically resonant cantilever can be detected either by field - effect modula- tion of an MOS transistor or , alternately , by using the cantilever as a ...
Page 465
... cantilever closure plate . The cantilever is attached at the right side , out of the photograph view , and extends to the left in the photograph . form the bottom of the closure plate and to passivate the bottom of the closure plate ...
... cantilever closure plate . The cantilever is attached at the right side , out of the photograph view , and extends to the left in the photograph . form the bottom of the closure plate and to passivate the bottom of the closure plate ...
Page 570
... cantilever beams and latching mechanisms . Using this orientation , cantilever beams can be fabricated such that they deflect in a parallel direction the wafer surface . It might be possible to fabricate structures such as setback ...
... cantilever beams and latching mechanisms . Using this orientation , cantilever beams can be fabricated such that they deflect in a parallel direction the wafer surface . It might be possible to fabricate structures such as setback ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus