Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 23
... caused by the vibration of a gate held at con- stant voltage is equivalent to that of a conventional FET in which the gate is fixed in position but the voltage changes . Therefore , electrostatic force = — - ( VP + ein sin wt ) 2 2 acso ...
... caused by the vibration of a gate held at con- stant voltage is equivalent to that of a conventional FET in which the gate is fixed in position but the voltage changes . Therefore , electrostatic force = — - ( VP + ein sin wt ) 2 2 acso ...
Page 406
... caused by rapid deformations of piezoelectric elements . One dimen- sional linear positioner using this mechanism consists of one main object put on a guiding surface , a piezo and a weight . The weight is connected to one end of the ...
... caused by rapid deformations of piezoelectric elements . One dimen- sional linear positioner using this mechanism consists of one main object put on a guiding surface , a piezo and a weight . The weight is connected to one end of the ...
Page 441
... caused by silicon peaks which keep the silicon and the glass ( valve seat ) separated . ( c ) Pressure sensors and flow measurements Pressure sensors have square dia- phragms of which thickness is about 25 um and length is about 2.5 mm ...
... caused by silicon peaks which keep the silicon and the glass ( valve seat ) separated . ( c ) Pressure sensors and flow measurements Pressure sensors have square dia- phragms of which thickness is about 25 um and length is about 2.5 mm ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus