Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 253
... charge actuator changes field discontinuously . It enables the repulsive force to be produced . Moreover , slide of charges in the resistor is smaller than that of the induction motor . Therefore , energy loss in the resistor is smaller ...
... charge actuator changes field discontinuously . It enables the repulsive force to be produced . Moreover , slide of charges in the resistor is smaller than that of the induction motor . Therefore , energy loss in the resistor is smaller ...
Page 269
... charge will be concentrated in that position on the conductor closest to the positive charge . If the conductor is an infinite plane ( in practice , if its edges are at distances >> h ) the fields generated by the charge arrangement ...
... charge will be concentrated in that position on the conductor closest to the positive charge . If the conductor is an infinite plane ( in practice , if its edges are at distances >> h ) the fields generated by the charge arrangement ...
Page 289
... charge distribution in synchronism with that of the rotor so as to maintain the horizontal offset between the two as shown in Figure 3 ( A ) . To do so , the stator is constructed with conducting electrodes on which the charge can be in ...
... charge distribution in synchronism with that of the rotor so as to maintain the horizontal offset between the two as shown in Figure 3 ( A ) . To do so , the stator is constructed with conducting electrodes on which the charge can be in ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus