Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 278
... circuit . The loss is given as follows : Energy loss by charging current : Suppose an equivalent circuit in Fig.2 ( a ) to calculate the energy loss in the resistance . The resistance includes that of the switch and of the wire . The ...
... circuit . The loss is given as follows : Energy loss by charging current : Suppose an equivalent circuit in Fig.2 ( a ) to calculate the energy loss in the resistance . The resistance includes that of the switch and of the wire . The ...
Page 539
... circuit inter- connections . Both blanket tungsten with etching [ 11 , 12 ] and selective CVD tungsten [ 3-7 ] have been investigated extensively . Because of tung- sten's compatibility with silicon integrated circuit technology and ...
... circuit inter- connections . Both blanket tungsten with etching [ 11 , 12 ] and selective CVD tungsten [ 3-7 ] have been investigated extensively . Because of tung- sten's compatibility with silicon integrated circuit technology and ...
Page 660
... circuit , and automatic logic checking and timing estimates can be made , all before the circuit is built . As a result , while the design cost for a new circuit may be signif- icant , the final device can be expected to perform ...
... circuit , and automatic logic checking and timing estimates can be made , all before the circuit is built . As a result , while the design cost for a new circuit may be signif- icant , the final device can be expected to perform ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus