Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 28
Page 78
... Cross section trimmed ΑΙ Sensor location Pressure tube resistors il Glass 200μ connection ( a ) T 25μ Silicon ( p - type ) Diffused resistors ( Reference pressure ) 200μ Diaphragm Glass Frit . bonds Silicon Glass cap Top plate of ...
... Cross section trimmed ΑΙ Sensor location Pressure tube resistors il Glass 200μ connection ( a ) T 25μ Silicon ( p - type ) Diffused resistors ( Reference pressure ) 200μ Diaphragm Glass Frit . bonds Silicon Glass cap Top plate of ...
Page 102
... cross - sectional area carries one - tenth the current . The heat generated per volume of windings is constant for this case . The force generated for this constant current case scales as [ s4 ] ( { s3 } ) , i.e. , when the system ...
... cross - sectional area carries one - tenth the current . The heat generated per volume of windings is constant for this case . The force generated for this constant current case scales as [ s4 ] ( { s3 } ) , i.e. , when the system ...
Page 207
... area of the plates , and for Fw , the area is the cross section between the plates . For a typical electrostatic actuator with 100 V across a 1 - μm air gap , this pressure is 4.42 × 104 N / m2 . Hence , the pressure generated by an ...
... area of the plates , and for Fw , the area is the cross section between the plates . For a typical electrostatic actuator with 100 V across a 1 - μm air gap , this pressure is 4.42 × 104 N / m2 . Hence , the pressure generated by an ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus