Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 242
... curvature . We will set Ec = Ex πείο v2 = k Ay2 / 2 cosh ' ( S / R ) and ( 1 / Eba3 Ay2 = k Ay2 / 2 V = 313 = - 2 The spring constant k is k = Eba3 / 313 2πείο Ay ( k cosh ' ( S / R ) 1/2 or rewriting in terms of the radius of curvature ...
... curvature . We will set Ec = Ex πείο v2 = k Ay2 / 2 cosh ' ( S / R ) and ( 1 / Eba3 Ay2 = k Ay2 / 2 V = 313 = - 2 The spring constant k is k = Eba3 / 313 2πείο Ay ( k cosh ' ( S / R ) 1/2 or rewriting in terms of the radius of curvature ...
Page 493
... curvature into an already flat polyimide element . The thickness dependence of the curvature is a complex function of the relative stresses in the polyimide and metal . Al- uminum evaporated in both electron - beam and filament systems ...
... curvature into an already flat polyimide element . The thickness dependence of the curvature is a complex function of the relative stresses in the polyimide and metal . Al- uminum evaporated in both electron - beam and filament systems ...
Page 665
... curvature of this same curve . However , it must be recognized that more exact solutions for the membrane deflection may not separate so cleanly into two independent terms . Load - deflection measurements of the suspended polyimide ...
... curvature of this same curve . However , it must be recognized that more exact solutions for the membrane deflection may not separate so cleanly into two independent terms . Load - deflection measurements of the suspended polyimide ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus