Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 280
... Cylindrical electrode ( roller ) - dielectric fluid 0.3μm Insulation layer 0.7μm Fig.6 Cross section of ESLAC . on Cylindrical electrode ( roller ) rotor Fig.5 Rotor and stator of the electrostatic motor . Electrostatic linear actuator ...
... Cylindrical electrode ( roller ) - dielectric fluid 0.3μm Insulation layer 0.7μm Fig.6 Cross section of ESLAC . on Cylindrical electrode ( roller ) rotor Fig.5 Rotor and stator of the electrostatic motor . Electrostatic linear actuator ...
Page 325
... cylindrical hole containing a slightly smaller cylindrical rotor is an example of this harmonic motion . As the rotor rolls on the inside of the hole without slipping , it also ro- tates slightly . This slight rotation of the rotor ...
... cylindrical hole containing a slightly smaller cylindrical rotor is an example of this harmonic motion . As the rotor rolls on the inside of the hole without slipping , it also ro- tates slightly . This slight rotation of the rotor ...
Page 334
... cylindrical stator , b ) rotors which roll on or in stators which are noncylindrical ( planar , conical or spherical ) and noncircular ( polygonal or geared ) . Furthermore , many alternatives exist for the combination of wobble motors ...
... cylindrical stator , b ) rotors which roll on or in stators which are noncylindrical ( planar , conical or spherical ) and noncircular ( polygonal or geared ) . Furthermore , many alternatives exist for the combination of wobble motors ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus