Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 288
... density is limited to approximately 9.0 x 105 J.m - 3 . Although this energy density is independent of the size of the motor , it may well be unachievable in a micromotor . The current density in the windings which produce the magnetic ...
... density is limited to approximately 9.0 x 105 J.m - 3 . Although this energy density is independent of the size of the motor , it may well be unachievable in a micromotor . The current density in the windings which produce the magnetic ...
Page 304
... density displays a singularity at the edges of the lands , in accordance with the implicit assumption of zero land thickness . The charge density distribution gets skewed as the rotor offset increases , with a higher charge density over ...
... density displays a singularity at the edges of the lands , in accordance with the implicit assumption of zero land thickness . The charge density distribution gets skewed as the rotor offset increases , with a higher charge density over ...
Page 307
... density through the windings , and still keep the motor cool . Increasing the current density makes electromagnetic forces competitive with other micro actuators . Increasing the current density raises other considerations . In ...
... density through the windings , and still keep the motor cool . Increasing the current density makes electromagnetic forces competitive with other micro actuators . Increasing the current density raises other considerations . In ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus