Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 251
... developed . It utilizes image charges induced on high resistor to produce force . It have been fabricated on polymer films and a prototype of the multi - layered actuator with four film actuators have been constructed . The fabricated ...
... developed . It utilizes image charges induced on high resistor to produce force . It have been fabricated on polymer films and a prototype of the multi - layered actuator with four film actuators have been constructed . The fabricated ...
Page 261
... developed □ icro electro static actuator with three degrees of freedom , which can be applied to a □ icro - manipulator . This actuator has a flat surface with quad electrodes , all of which can be regulated by the voltages . In this ...
... developed □ icro electro static actuator with three degrees of freedom , which can be applied to a □ icro - manipulator . This actuator has a flat surface with quad electrodes , all of which can be regulated by the voltages . In this ...
Page 389
... developed successfully will be explained as follows . At first , TiNi thin films 10μm thick were made on NaCl plates ... developed . Therefore , next step to develop a micron sized robot should be proceeded by fabricating it on the Si ...
... developed successfully will be explained as follows . At first , TiNi thin films 10μm thick were made on NaCl plates ... developed . Therefore , next step to develop a micron sized robot should be proceeded by fabricating it on the Si ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus