Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 328
... diameter ( eighth inch reamers and dowel pins were readily available ) . Smaller , and larger , motors of this design are feasible . Larger motors may find applications in commercial products such as auto focus cameras , and smaller ...
... diameter ( eighth inch reamers and dowel pins were readily available ) . Smaller , and larger , motors of this design are feasible . Larger motors may find applications in commercial products such as auto focus cameras , and smaller ...
Page 334
... diameter ) insulated and potted in epoxy . The stator is 1,350 microns in diameter and 15-20 mm in length . Rotors have been fabricated of both conductors and insulators with diameters of 1,250 microns and lengths of 15 mm . The motor ...
... diameter ) insulated and potted in epoxy . The stator is 1,350 microns in diameter and 15-20 mm in length . Rotors have been fabricated of both conductors and insulators with diameters of 1,250 microns and lengths of 15 mm . The motor ...
Page 335
... diameter stainless steel wires were coextruded with a polyethylene thermo- plastic to form the stator of a wobble ... diameter of the stator is machined to 560 microns . The stator outer diameter is typically 9,525 microns and its length ...
... diameter stainless steel wires were coextruded with a polyethylene thermo- plastic to form the stator of a wobble ... diameter of the stator is machined to 560 microns . The stator outer diameter is typically 9,525 microns and its length ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus