Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 249
... displacement amplitudes attained for the structures are shown in Table 1. For an applied voltage of 127V , a static displacement of 32 μm was measured for a single bar T - drive with 446 um beams at an angle of 5.2 ° . The 32 μm ...
... displacement amplitudes attained for the structures are shown in Table 1. For an applied voltage of 127V , a static displacement of 32 μm was measured for a single bar T - drive with 446 um beams at an angle of 5.2 ° . The 32 μm ...
Page 403
... displacement sensor ( range : 1 mm , resolution : 0.5 μm ) . The relation between displacement and charged energy of the capacitor is shown in Fig.4 . This result represents that the displacement is almost proportion to the square of ...
... displacement sensor ( range : 1 mm , resolution : 0.5 μm ) . The relation between displacement and charged energy of the capacitor is shown in Fig.4 . This result represents that the displacement is almost proportion to the square of ...
Page 415
... displacement of piezoelectric element is ( VM + Vm ) t = L ( 2 ) speed 20 10 D O 0 B O According to equation ( 1 ) ... displacement which consists of two stage ( stage 2 and 6 in Fig.3 ) in one sequence is analyzed . 5.1.1 Analysis of ...
... displacement of piezoelectric element is ( VM + Vm ) t = L ( 2 ) speed 20 10 D O 0 B O According to equation ( 1 ) ... displacement which consists of two stage ( stage 2 and 6 in Fig.3 ) in one sequence is analyzed . 5.1.1 Analysis of ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus