Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 380
... elasticity and plasicity of the material , the approximated model will be derived . As easily understood from Fig.3 ... elastic strain . Therefore , the profile model of SMA sheet is derived as shown in Fig.4 . Next , the relationship ...
... elasticity and plasicity of the material , the approximated model will be derived . As easily understood from Fig.3 ... elastic strain . Therefore , the profile model of SMA sheet is derived as shown in Fig.4 . Next , the relationship ...
Page 665
... strain boundary conditions at the edges of the membrane and lead to nearly ... elastic film constants ( i.e. , Young's modulus ) . In this model ... elastic component . Thus , we expect to be able to extract values for intrinsic film ...
... strain boundary conditions at the edges of the membrane and lead to nearly ... elastic film constants ( i.e. , Young's modulus ) . In this model ... elastic component . Thus , we expect to be able to extract values for intrinsic film ...
Page 668
... strain energy deformation to the elastic strain energy due to internal tensile stress . The strain energy due to bending can be neglected in the case of very thin films with deflection many times larger than their thickness . The ...
... strain energy deformation to the elastic strain energy due to internal tensile stress . The strain energy due to bending can be neglected in the case of very thin films with deflection many times larger than their thickness . The ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus