Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 210
... ELECTRIC FIELD ANALYSIS Analytical solution Let us derive a ' handy ' analyti- cal solution on following assumptions ... electric field in the right half plane in Fig.3 ( a ) can be replace by the field in field in a cylinder - to ...
... ELECTRIC FIELD ANALYSIS Analytical solution Let us derive a ' handy ' analyti- cal solution on following assumptions ... electric field in the right half plane in Fig.3 ( a ) can be replace by the field in field in a cylinder - to ...
Page 288
... electric field in the gap . In a con- ventional electric motor with an air gap , E is limited to approximately 3.0 x 106 V m - 1 by the electrical break- down of air [ 21,9,32 ] . Thus , the stored energy density is limited to ...
... electric field in the gap . In a con- ventional electric motor with an air gap , E is limited to approximately 3.0 x 106 V m - 1 by the electrical break- down of air [ 21,9,32 ] . Thus , the stored energy density is limited to ...
Page 298
... electric field and free charge are assumed to be uniform in the r direction . Thus , fringing electric fields are ignored , and the model becomes two - dimensional . This is justified if the difference between the inner and outer active ...
... electric field and free charge are assumed to be uniform in the r direction . Thus , fringing electric fields are ignored , and the model becomes two - dimensional . This is justified if the difference between the inner and outer active ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus