Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 398
... Element Design The design phase of the active element consists in determining the appropriate geometry of the SMA element in order to obtain the desired actu- ation performances . The SMA wire is able to generate the largest reversion ...
... Element Design The design phase of the active element consists in determining the appropriate geometry of the SMA element in order to obtain the desired actu- ation performances . The SMA wire is able to generate the largest reversion ...
Page 492
... ELEMENT TETHER Substrate 3 W I 8 ( a ) TA Fig.2 Illustration of microfabricated floating - element shear sensor : top view and two sections . reported suspended polysilicon struc- tures5,6 ) . Figure 3 is a SEM photograph of a floating ...
... ELEMENT TETHER Substrate 3 W I 8 ( a ) TA Fig.2 Illustration of microfabricated floating - element shear sensor : top view and two sections . reported suspended polysilicon struc- tures5,6 ) . Figure 3 is a SEM photograph of a floating ...
Page 493
... element so as not to perturb the flow . The element is patterned such that polyimide will be left in the field region to passivate the chip and also reduce the amount by which the element protrudes from the surface . The gaps between ...
... element so as not to perturb the flow . The element is patterned such that polyimide will be left in the field region to passivate the chip and also reduce the amount by which the element protrudes from the surface . The gaps between ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus