Micromechanics and MEMS: classic and seminal papers to 1990
IEEE Press, Jan 29, 1997 - Science - 701 pages
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
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Early Papers in Micromechanics
Side Drive Actuators
Comb Drive Actuators
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accelerometer alignment anisotropic etching applied bonding cantilever capacitance capacitor cavity charge chip circuit clamping deflection density deposited developed diaphragm dielectric displacement drive electric field Electron Devices electrostatic force electrostatic motor element etchant experimental fabrication fiber Figure flow frequency friction geometry glass IEEE Micro input insulator integrated layer levitation linear LPCVD magnetic mask material measured Mechanical Systems membrane metal microactuators microdynamics micromachining micromotor microstructures motion operation optical output oxide parameters pattern photoresist piezoelectric planes plate poly-Si polyimide polysilicon potential pressure sensor ratio Research resistor resonant rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive silicon dioxide silicon nitride silicon wafer simulation slider Solid-State Sensors stator step stress structure substrate surface techniques temperature thermal thickness thin films tion torque Transducers tungsten valve velocity voltage wire wobble motor Workshop Young's modulus