Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 42
... etchant is limited by an etch - stop layer , a prolonged aniso- tropic etch ultimately yields an oxide tab ... etchant on crystal direction are not well understood . The differences in etch rate depend on temperature and on the ...
... etchant is limited by an etch - stop layer , a prolonged aniso- tropic etch ultimately yields an oxide tab ... etchant on crystal direction are not well understood . The differences in etch rate depend on temperature and on the ...
Page 43
... etchant ( a category that overlaps the categories of isotropic and anisotropic etchants ) depends on the type of dopant atoms and their concentration . The iso- tropic - etchant HNA is doping - depen- dent in some mixture ratios : it ...
... etchant ( a category that overlaps the categories of isotropic and anisotropic etchants ) depends on the type of dopant atoms and their concentration . The iso- tropic - etchant HNA is doping - depen- dent in some mixture ratios : it ...
Page 574
... etchant . A simple and efficient calculating method of this design is presented to obtain satisfac- tory compensation . INTRODUCTION It is known that there is corner undercutting at convex corner in aniso- tropic etching of ( 100 ) ...
... etchant . A simple and efficient calculating method of this design is presented to obtain satisfac- tory compensation . INTRODUCTION It is known that there is corner undercutting at convex corner in aniso- tropic etching of ( 100 ) ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus