Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 337
... EXPERIMENTAL RESULTS COMMENTS Experimental evaluation of the wobble motor concept is proceeding in three preliminary stages aimed at generating initial , order - of- magnitude estimates of performance , with more precise measurements ...
... EXPERIMENTAL RESULTS COMMENTS Experimental evaluation of the wobble motor concept is proceeding in three preliminary stages aimed at generating initial , order - of- magnitude estimates of performance , with more precise measurements ...
Page 479
... experimental results are compared with theoretical predictions based on the Navier - Stokes equations and with information available in the ... EXPERIMENTAL APPARATUS AND PROCEDURE The experimental apparatus is depicted schematically 479.
... experimental results are compared with theoretical predictions based on the Navier - Stokes equations and with information available in the ... EXPERIMENTAL APPARATUS AND PROCEDURE The experimental apparatus is depicted schematically 479.
Page 485
... experimental data . to wall friction . In our experiments , we measure the total pressure loss ( Ap ) and we estimate Apa . Because of the very small size of the channel , the thermal equalization time between the gas temperature and ...
... experimental data . to wall friction . In our experiments , we measure the total pressure loss ( Ap ) and we estimate Apa . Because of the very small size of the channel , the thermal equalization time between the gas temperature and ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus