Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 33
... load re- sistors of the FET . The relatively low value of the load resistors and the elimination of any capacitors ... external resistors of л ( b ) ( c ) • Fig . 16. Twin RGT oscillator requiring no external 90 ° phase shift network ...
... load re- sistors of the FET . The relatively low value of the load resistors and the elimination of any capacitors ... external resistors of л ( b ) ( c ) • Fig . 16. Twin RGT oscillator requiring no external 90 ° phase shift network ...
Page 283
... external force ( load ) , F , the numerator of Eq . ( 18 ) should read F - 2F . The fabrication process X There are couple of requirements for the process and its product ; ( 1 ) compatibility with VLSI process , ( 2 ) batch fabrication ...
... external force ( load ) , F , the numerator of Eq . ( 18 ) should read F - 2F . The fabrication process X There are couple of requirements for the process and its product ; ( 1 ) compatibility with VLSI process , ( 2 ) batch fabrication ...
Page 320
... external fields . This suggests a number of noncontact micromechanical bearing applications , such as for microrobotics and highly sensitive sensors . Diamagnetic bearings are typically limited to light - load applications . To ...
... external fields . This suggests a number of noncontact micromechanical bearing applications , such as for microrobotics and highly sensitive sensors . Diamagnetic bearings are typically limited to light - load applications . To ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus