Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 57
... HARDENED CIRCUITS ELECTRONIC PRINTER CROSSPOINTS ISO PLANAR POLY PLANAR V MOS J FET ARRAYS DI PROCESS THICKNESS INDICATOR SOLID STATE PRESSURE TRANSDUCER SOLAR CELL ANTI - REFLECTING SURFACE HIGH VOLTAGE DIODE ARRAYS VERTICAL MULTIPLE ...
... HARDENED CIRCUITS ELECTRONIC PRINTER CROSSPOINTS ISO PLANAR POLY PLANAR V MOS J FET ARRAYS DI PROCESS THICKNESS INDICATOR SOLID STATE PRESSURE TRANSDUCER SOLAR CELL ANTI - REFLECTING SURFACE HIGH VOLTAGE DIODE ARRAYS VERTICAL MULTIPLE ...
Page 408
... hardened 0.35 % C steel , while the ball cover is 0.45 % C steel . Six piezos and six weights are attached to the arm . The piezos are the same ones that used in the one dimensional rotating arm . Their sizes are 2x3x10mm . The weight ...
... hardened 0.35 % C steel , while the ball cover is 0.45 % C steel . Six piezos and six weights are attached to the arm . The piezos are the same ones that used in the one dimensional rotating arm . Their sizes are 2x3x10mm . The weight ...
Page 624
... hardening of the resin serves as an electrode in a second electroforming process for gen- erating secondary metallic microstructures . It has been demonstrated by many experiments that , in spite of an aspect ratio of about 100 and ...
... hardening of the resin serves as an electrode in a second electroforming process for gen- erating secondary metallic microstructures . It has been demonstrated by many experiments that , in spite of an aspect ratio of about 100 and ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus