Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 85
... horizontal line in the display . The inset shows a photograph of the display projected onto the ground glass screen ... horizontally by a galva- nometer to produce a two - dimensional display by rapidly deflecting each membrane ...
... horizontal line in the display . The inset shows a photograph of the display projected onto the ground glass screen ... horizontally by a galva- nometer to produce a two - dimensional display by rapidly deflecting each membrane ...
Page 289
... horizontal force acting on the rotor diminishes . Therefore , in order to sustain the horizontal force , and hence desired rotor motion , it is necessary to advance the stator charge distribution in synchronism with that of the rotor so ...
... horizontal force acting on the rotor diminishes . Therefore , in order to sustain the horizontal force , and hence desired rotor motion , it is necessary to advance the stator charge distribution in synchronism with that of the rotor so ...
Page 323
... horizontally , after 40 μs the bearing will already be at the 400 - cm / s velocity necessary to support a full downward force of 400 dyne / cm . The conclusion is that in cases where high horizontal accelera- tions are possible ...
... horizontally , after 40 μs the bearing will already be at the 400 - cm / s velocity necessary to support a full downward force of 400 dyne / cm . The conclusion is that in cases where high horizontal accelera- tions are possible ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus