Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 283
... inertia of the roller are M , r , and J. The weight of the plate per roller is m . Only the movement in the horizontal direction ( parallel to the substrate ) is analyzed . The horizon- tal forces on the roller are the electrostatic ...
... inertia of the roller are M , r , and J. The weight of the plate per roller is m . Only the movement in the horizontal direction ( parallel to the substrate ) is analyzed . The horizon- tal forces on the roller are the electrostatic ...
Page 340
... inertia about a generator ( A ) is adopted as a value which shows the ease of rota- tion of the rotor . The moment of inertia about a generator ( 1 ) is calculated by eqn . ( 1 ) , assuming a uniform surface mass density . The ease of ...
... inertia about a generator ( A ) is adopted as a value which shows the ease of rota- tion of the rotor . The moment of inertia about a generator ( 1 ) is calculated by eqn . ( 1 ) , assuming a uniform surface mass density . The ease of ...
Page 415
... inertia part m : weight of inertia part μ : coefficient static friction μ ' : coefficient of kinetic friction L : displacement of piezoelectric element a : acceleration of contracting piezoelectric element velocity of main body VM : Vm ...
... inertia part m : weight of inertia part μ : coefficient static friction μ ' : coefficient of kinetic friction L : displacement of piezoelectric element a : acceleration of contracting piezoelectric element velocity of main body VM : Vm ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus