Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 76
Page 22
... integrated circuits . Therefore , it is mandatory that the most stable and most controllable parameters of an integrated circuit be used as the critical tuning elements . The tolerance problem is further aggravated if the resonant ...
... integrated circuits . Therefore , it is mandatory that the most stable and most controllable parameters of an integrated circuit be used as the critical tuning elements . The tolerance problem is further aggravated if the resonant ...
Page 440
... Integrated Mass Flow Controllers . ” pp . 830-833 . June 1987. © Institute of Electrical Engineers of Japan NORMALLY CLOSE MICROVALVE AND MICROPUMP FABRICATED ON A SILICON WAFER. + + ++ + ABSTRUCT One Two types of mass flow controller of ...
... Integrated Mass Flow Controllers . ” pp . 830-833 . June 1987. © Institute of Electrical Engineers of Japan NORMALLY CLOSE MICROVALVE AND MICROPUMP FABRICATED ON A SILICON WAFER. + + ++ + ABSTRUCT One Two types of mass flow controller of ...
Page 539
... integration of micromechanical devices with silicon integrated circuits is a key goal of microelectromechanical systems ( MEMS ) re- search . Therefore , choosing materials and pro- cesses compatible with silicon technology is one key ...
... integration of micromechanical devices with silicon integrated circuits is a key goal of microelectromechanical systems ( MEMS ) re- search . Therefore , choosing materials and pro- cesses compatible with silicon technology is one key ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus