Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 314
... levitation heights by using a laser displacement meter , and on the slider's movement by using an image processing techniques . As the results , the 8mg slider stably levitated 0.99mm above the stator at 280G . The levitation height was ...
... levitation heights by using a laser displacement meter , and on the slider's movement by using an image processing techniques . As the results , the 8mg slider stably levitated 0.99mm above the stator at 280G . The levitation height was ...
Page 315
... Levitation using graphite or bismuth ( whose magnetic susceptibility , x , is about -10-6 , where μr = 1 + x ) was experimentally examined [ 7,8 ] . It was also reported that it should be possible to levitate a permanent magnet in ...
... Levitation using graphite or bismuth ( whose magnetic susceptibility , x , is about -10-6 , where μr = 1 + x ) was experimentally examined [ 7,8 ] . It was also reported that it should be possible to levitate a permanent magnet in ...
Page 317
... Levitation height [ mm ] 0.8 0.7 0.6 0.5 0.4 20 0 0.5 1 Weight of slider [ mgf ] Fig.4 Levitation height versus weight of slider . when the characteristics are being measured . The slider is levitated above the stator which is cooled by ...
... Levitation height [ mm ] 0.8 0.7 0.6 0.5 0.4 20 0 0.5 1 Weight of slider [ mgf ] Fig.4 Levitation height versus weight of slider . when the characteristics are being measured . The slider is levitated above the stator which is cooled by ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus