Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 176
... pole is electrically connected to form three stator pole sets or phases . Although all the rotor poles are a single piece of conducting material , they can be thought of as being two pole sets . This pole geometry allows one rotor pole ...
... pole is electrically connected to form three stator pole sets or phases . Although all the rotor poles are a single piece of conducting material , they can be thought of as being two pole sets . This pole geometry allows one rotor pole ...
Page 224
... poles and pole faces 3 μm wide . Most of the face of the motor is covered with pole faces ( r ; = 1 mm , r = 2.5 mm ) . The rotor is assumed to be г。 spinning at 100 rps . The motor produces 0.5 W , but the alignment tolerances are ...
... poles and pole faces 3 μm wide . Most of the face of the motor is covered with pole faces ( r ; = 1 mm , r = 2.5 mm ) . The rotor is assumed to be г。 spinning at 100 rps . The motor produces 0.5 W , but the alignment tolerances are ...
Page 228
... pole faces in one sector cannot all simultaneously coincide . If the misalignment is too much , some pole faces will be pulling while others are pushing , and the efficiency of the motor will be decreased . In the following calculations ...
... pole faces in one sector cannot all simultaneously coincide . If the misalignment is too much , some pole faces will be pulling while others are pushing , and the efficiency of the motor will be decreased . In the following calculations ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus