Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 158
... poly - Si layer is patterned and plasma etched to define the 1 um - thick micromotor pin bearing and stator islands , as well as 0.5 μm- thick singly and doubly - supported micro - beams . Finally , the sandwich of patterned LTO and poly ...
... poly - Si layer is patterned and plasma etched to define the 1 um - thick micromotor pin bearing and stator islands , as well as 0.5 μm- thick singly and doubly - supported micro - beams . Finally , the sandwich of patterned LTO and poly ...
Page 505
... Poly - Si micromechanical beams having thicknesses of 230 nm to 2.3 μm and separated by 550 nm to 3.5μm from the substrate are made in a wide range of lengths ... Si microbeam fabrication Thickness of poly - Si beam FIRST RUN SECOND RUN 505.
... Poly - Si micromechanical beams having thicknesses of 230 nm to 2.3 μm and separated by 550 nm to 3.5μm from the substrate are made in a wide range of lengths ... Si microbeam fabrication Thickness of poly - Si beam FIRST RUN SECOND RUN 505.
Page 506
... Poly - Si cantilevers : 60 μm long , 800 nm thick , with a 3.5 μm beam - substrate gap . 230 nm о о 800 nm о 1.2μm о O : First run , Cantilevers . O O : Second run , 2.0μm о О 2.3μm Cantilevers & bridges . Fig . 3. Poly - Si and oxide ...
... Poly - Si cantilevers : 60 μm long , 800 nm thick , with a 3.5 μm beam - substrate gap . 230 nm о о 800 nm о 1.2μm о O : First run , Cantilevers . O O : Second run , 2.0μm о О 2.3μm Cantilevers & bridges . Fig . 3. Poly - Si and oxide ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus