Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 48
... SENSOR GROUP SILICON PRESSURE SENSOR is shown in the middle of its fabrication sequence . The re- cessed square in the center of the photomicrograph is a thin pressure - sensing diaphragm .5 mil- limeter on a side . Purple serpentine ...
... SENSOR GROUP SILICON PRESSURE SENSOR is shown in the middle of its fabrication sequence . The re- cessed square in the center of the photomicrograph is a thin pressure - sensing diaphragm .5 mil- limeter on a side . Purple serpentine ...
Page 78
... sensor Temperature sensor Silicon diaphragm Amplifiers On - chip bipolar Top view Transducer capacitor electronics Vacuum reference Active Cross section trimmed ΑΙ Sensor location Pressure tube resistors il Glass 200μ connection ( a ) T ...
... sensor Temperature sensor Silicon diaphragm Amplifiers On - chip bipolar Top view Transducer capacitor electronics Vacuum reference Active Cross section trimmed ΑΙ Sensor location Pressure tube resistors il Glass 200μ connection ( a ) T ...
Page 448
... pressure loss at the oneway valve . Since the pressure loss change ( AP / 4Q ) of the one way valve is larger at small flow rate than at large flow rate , this sensor has large sensitivity to small flow . Inlet Outlet One way Valve ...
... pressure loss at the oneway valve . Since the pressure loss change ( AP / 4Q ) of the one way valve is larger at small flow rate than at large flow rate , this sensor has large sensitivity to small flow . Inlet Outlet One way Valve ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus