Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 87
Page 171
... ratio of the wobble micromotor is equal to the bearing radius divided by the bearing clearance ( see Eqn . ( 1 ) ) , under extended operation , changes in the gear ratio ( reflected in changes in ... Ratio Gear Ratio 95 90 85 80 75 70 171.
... ratio of the wobble micromotor is equal to the bearing radius divided by the bearing clearance ( see Eqn . ( 1 ) ) , under extended operation , changes in the gear ratio ( reflected in changes in ... Ratio Gear Ratio 95 90 85 80 75 70 171.
Page 341
... ratio of rotors 1. 0 Ra Fig . 6. The relationship between the aspect ratio of the rotor ( R ) and A. 3.2 . Driving Experiment The dimensions of the stator used in the exper- iments are the same as those of the analysis model in Fig . 2 ...
... ratio of rotors 1. 0 Ra Fig . 6. The relationship between the aspect ratio of the rotor ( R ) and A. 3.2 . Driving Experiment The dimensions of the stator used in the exper- iments are the same as those of the analysis model in Fig . 2 ...
Page 668
... RATIO Dependence of the constant Co on Poisson's ratio and membrane shape . p = C1oth / a2 + C2Eth3 / a4 C1 = 4 ( 1 + n2 ) / 64 C2 6/32 ( 1 - v2 ) } { ( 9 + 2n2 + 9n4 ) / 256- ( 4 + n + n2 + 4n3-3nv ( 1 + n ) ) 2/2 determination of both ...
... RATIO Dependence of the constant Co on Poisson's ratio and membrane shape . p = C1oth / a2 + C2Eth3 / a4 C1 = 4 ( 1 + n2 ) / 64 C2 6/32 ( 1 - v2 ) } { ( 9 + 2n2 + 9n4 ) / 256- ( 4 + n + n2 + 4n3-3nv ( 1 + n ) ) 2/2 determination of both ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus