Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 47
... resistor . Because glass is a poor thermal conductor ( whereas silicon is a good one ) , the membrane thermally isolates the resistor . A change in the thermal conductivity of the gas stream flowing over the resistor alters its ...
... resistor . Because glass is a poor thermal conductor ( whereas silicon is a good one ) , the membrane thermally isolates the resistor . A change in the thermal conductivity of the gas stream flowing over the resistor alters its ...
Page 77
... resistor . When a dc control current is applied to one resistor , the silicon island experiences a tem- perature rise which is detected by the corresponding diode . Meanwhile , a part of the ac output signal is applied to the resistor ...
... resistor . When a dc control current is applied to one resistor , the silicon island experiences a tem- perature rise which is detected by the corresponding diode . Meanwhile , a part of the ac output signal is applied to the resistor ...
Page 79
Classic and Seminal Papers to 1990 William S. Trimmer. Etched suture hole Diffused resistor Support Rim Contact pads mm ( a ) Diffused resistor on thinned silicon beam Etched glass plate . Silicon Cantilever Beam End Mass 7740 7740 ...
Classic and Seminal Papers to 1990 William S. Trimmer. Etched suture hole Diffused resistor Support Rim Contact pads mm ( a ) Diffused resistor on thinned silicon beam Etched glass plate . Silicon Cantilever Beam End Mass 7740 7740 ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus