Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 188
... RESONANT STRUCTURE DESIGN We now consider the mechanical design of two classes of lateral resonant structures which demonstrate the power and flexibility of the lateral drive approach : linear resonant plates with folded supporting ...
... RESONANT STRUCTURE DESIGN We now consider the mechanical design of two classes of lateral resonant structures which demonstrate the power and flexibility of the lateral drive approach : linear resonant plates with folded supporting ...
Page 191
... Resonant Frequency Values of the Linear Resonant Structures VOO Type A Type B Beam length Predicted Measured Predicted Measured [ um ] [ kHz ] [ kHz ] [ kHz ] [ kHz ] 80 75.5 75.0 ± 0.05 71.8 72.3 ± 0.05 100 53.7 54.3 ± 0.05 51.1 50.8 ...
... Resonant Frequency Values of the Linear Resonant Structures VOO Type A Type B Beam length Predicted Measured Predicted Measured [ um ] [ kHz ] [ kHz ] [ kHz ] [ kHz ] 80 75.5 75.0 ± 0.05 71.8 72.3 ± 0.05 100 53.7 54.3 ± 0.05 51.1 50.8 ...
Page 192
... resonant structures with the calcu- lated values from Eqn . ( 4 ) , for which the capacitance variation ( DC / dx ) for the two types of comb drives is a fitting parameter . The type A drive is found to have DC / dx 58 aFum1 and the ...
... resonant structures with the calcu- lated values from Eqn . ( 4 ) , for which the capacitance variation ( DC / dx ) for the two types of comb drives is a fitting parameter . The type A drive is found to have DC / dx 58 aFum1 and the ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus